Preparation and Characterization of Dielectric Thin Films by RF Magnetron-Sputtering with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 Ceramic Target

Characterization of PZT Ferroelectric Thin Films by RF-magnetron Sputtering

By using Radio Frequency (RF) magnetron sputtering method, Pb(Zr0.5Ti0.5)O3 (PZT) thin films were deposited on Pt/Ti/ SiO2/Si substrates. Pt/Ti bottom electrode was fabricated on SiO2/Si substrates by magnetron dual-facing-target sputtering system. Phase and crystalline structure analyses of the PZT films were performed on an X-ray diffraction(XRD), Surface morphology, roughness and particle si...

Preparation and Characterization of Fast Ion Conducting Lithium Thio-Germanate Thin Films Grown by RF Magnetron Sputtering

In this study, amorphous lithium thio-germanate thin films were prepared by radio frequency (RF) sputtering deposition in Ar atmospheres. For the first time, new high quality lithium germanium sulfide nLi2S + GeS2 thin films, n = 1, 2, and 3, have been successfully made by RF sputtering and synthesized as new solid state electrolytes. Although these materials are unstable in air, the starting m...

The effect of sputtering RF power on structural, optical and electrical properties of CuO and CuO2 thin films

In this paper, the RF power change effect on the structural, optical and electrical properties of CuO thin films prepared by RF reactive magnetron sputtering deposited on glass substrates are studied. At first, the thin films are prepared at 150, 280, 310 and 340W respectively. Then, the films are characterized by XRD, AFM, Uv-visible and four-point probe analysis respectively. The results show...

Mechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering

Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...

The effect of alkali niobate addition on the phase stability and dielectric properties of Pb„Zn1/3Nb2/3...O3 based ceramic